Photoenhanced diffusion patterning for organic polymer films

Details Photoenhanced diffusion patterning for organic polymer films Photoenhanced diffusion patterning for organic polymer films

1992-05-07

1993-11-09

Rodee, Christopher D.

Radiation imagery chemistry: process, composition, or product th

Visible imaging including step of firing or sintering

430325, 430327, 430330, 430273, G03C 1100, G03F 738

Patent

active

052601633

ABSTRACT:
1. A method for making patterns in organic polymer films comprising the following steps:

REFERENCES:
patent: 4410562 (1983-10-01), Nemoto et al.
patent: 4429027 (1984-01-01), Chambers, Jr. et al.
patent: 4613560 (1986-09-01), Dueber et al.
patent: 5032216 (1991-07-01), Felten

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