Photoelectron spectroscopy apparatus and method of use

Radiant energy – Electron energy analysis

Reexamination Certificate

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C250S526000

Reexamination Certificate

active

07399963

ABSTRACT:
According to one aspect of the present invention, a substrate processing system is provided. The system may include a chamber wall enclosing a chamber, a substrate support positioned within the chamber to support a substrate, an electromagnetic radiation source to emit electromagnetic radiation onto the substrate on the substrate support, the electromagnetic radiation causing photoelectrons to be emitted from a material on the substrate, an analyzer to capture the photoelectrons emitted from the substrate, and a magnetic field generator to generate a magnetic field within the chamber and guide the photoelectrons from the substrate to the analyzer.

REFERENCES:
patent: 4486659 (1984-12-01), Turner
patent: 5053625 (1991-10-01), Follett
patent: 6545272 (2003-04-01), Kondo
patent: 6586728 (2003-07-01), Gavin et al.
patent: 6873915 (2005-03-01), Hastings
patent: 2004/0135081 (2004-07-01), Larson et al.
patent: 2006/0190916 (2006-08-01), Pike
PCT International Search Report for Application No. PCT/US 06/34781, mailing date Sep. 24, 2007 (5 pages).
PCT International Written Opinion for Application No. PCT/US 06/34781, mailing date Sep. 24, 2007 (5 pages).

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