Radiant energy – Electron energy analysis
Reexamination Certificate
2008-07-15
2008-07-15
Berman, Jack I. (Department: 2881)
Radiant energy
Electron energy analysis
C250S526000
Reexamination Certificate
active
07399963
ABSTRACT:
According to one aspect of the present invention, a substrate processing system is provided. The system may include a chamber wall enclosing a chamber, a substrate support positioned within the chamber to support a substrate, an electromagnetic radiation source to emit electromagnetic radiation onto the substrate on the substrate support, the electromagnetic radiation causing photoelectrons to be emitted from a material on the substrate, an analyzer to capture the photoelectrons emitted from the substrate, and a magnetic field generator to generate a magnetic field within the chamber and guide the photoelectrons from the substrate to the analyzer.
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Reed David A.
Schueler Bruno W.
Berman Jack I.
Blakely , Sokoloff, Taylor & Zafman LLP
ReVera Incorporated
Smyth Andrew
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