Photoelectron image projection apparatus

Details Photoelectron image projection apparatus Photoelectron image projection apparatus

1988-08-30

1991-07-02

Boudreau, Leo H.

Image analysis

Histogram processing

For setting a threshold

356237, 358106, 25036301, G06K 900

Patent

active

050292226

ABSTRACT:
A photoelectron image projection apparatus has a device for detecting an image of a pattern of a mask within a predetermined projection region of the mask. An image signal describing the detected image is compared with a reference image signal which is known from the pattern of the mask, and a defect in the projection pattern is detected when the two compared image signals differ.

REFERENCES:
patent: 3946203 (1976-03-01), Hecht et al.
patent: 4573195 (1986-02-01), de France
patent: 4748327 (1988-05-01), Shinozaki et al.
patent: 4809308 (1989-02-01), Adams et al.
patent: 4809341 (1989-02-01), Matsui et al.

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