Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1994-05-19
1996-03-19
Gonzalez, Frank
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356363, 250237G, 385 12, 385 14, G01B 1102, G02B 600
Patent
active
055007341
ABSTRACT:
An integrated optical interferometer is provided having a substrate located on one object and a measuring reflector or measuring diffraction grating located on another object. A beam impinging upon the substrate is split into two partial beams by a coupling grating and is coupled into a beam waveguide and supplied to another coupling grating. A second partial beam is routed by the measuring reflector to the second coupling grating and there interferes with the first partial beam. The second coupling grating is divided into a plurality of gratings which are phase-shifted with respect to each other so that signals that are phase-shifted with respect to each other can be generated by a plurality of detectors.
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Dr. Johannes Heidenhain GmbH
Eisenberg Jason D.
Gonzalez Frank
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