Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1988-01-26
1990-09-11
McGraw, Vincent P.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356354, 250237G, 350 9612, G01B 902
Patent
active
049557181
ABSTRACT:
A photoelectric measuring system measures relative movements between a diffraction grid and a substrate. An integrated semiconductor laser is formed on the substrate and emits radiation that is conducted via an optical waveguide and a focusing grating coupler onto the diffraction grid. The diffraction grid diffracts the incident radiation and directs it back onto the substrate. Diffracted component beams are received by waveguide horns having waveguide corrugation coupling gratings and are conducted via optical waveguides to a coupler, where the component beams are brought into interference to form a combined beam. This combined beam is transmitted from the coupler via optical waveguides to detectors which transform the combined beams into electrical signals that are displaced in phase with respect to one another. The electrical signals generated by the detectors can be processed in an evaluating circuit which may also be formed as an integrated circuit on the substrate, and then displayed. All of the elements from the semiconductor laser to the detectors are formed on the substrate as an integrated optical circuit.
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Dr. Johannes Heidenhain GmbH
McGraw Vincent P.
Turner S. A.
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