Photoelectric grating displacement measuring apparatus

Details Photoelectric grating displacement measuring apparatus Photoelectric grating displacement measuring apparatus

1976-08-20

1978-03-14

Helms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356169, H01J 314

Patent

active

040792528

ABSTRACT:
A measuring system includes a scale grating carried on one of two relatively movable bodies and an index grating carried on the other. The scale grating is illuminated directly in such a way that light passing from it to the index grating is at least partially diffuse. Detector means are provided to respond to the resulting spatially periodic distribution of illumination.

REFERENCES:
patent: 3578979 (1971-05-01), Kawaguchi et al.
patent: 3599004 (1971-08-01), Grendelmeier
patent: 3748043 (1973-07-01), Zipin
patent: 3796498 (1974-03-01), Post
patent: 3812352 (1974-05-01), MacGovern

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