Photoelectric detecting device

Optics: measuring and testing – Range or remote distance finding – With photodetection

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Details

356401, 350 68, 350370, 350401, G02B 2106

Patent

active

042511291

ABSTRACT:
A photoelectric detecting device in which a photoelectric detecting system for scanning a surface to be inspected by a light beam and for receiving the light from the inspected surface by a photoelectric detector is partly common to an observation optical system for illuminating the inspected surface with an illuminating light and for observing the inspected surface. The device has a dichroic mirror and a polarizing beam splitter, whereby photoelectric detection is effected without loss of light and without adverse effect of the illuminating light.

REFERENCES:
patent: 3751170 (1973-08-01), Hidaka
patent: 3796497 (1974-03-01), Mathisen et al.
patent: 3943359 (1976-03-01), Matsumoto et al.
patent: 4044363 (1977-08-01), Morgan
patent: 4062623 (1977-12-01), Suzuki et al.
patent: 4070117 (1978-01-01), Johannsmeir et al.
patent: 4110004 (1978-08-01), Bocker

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