Photoelectric detecting device

Details Photoelectric detecting device Photoelectric detecting device

1980-07-31

1983-09-27

Ponter, William H.

Optics: measuring and testing

By alignment in lateral direction

With light detector

G01B 1100

Patent

active

044065469

ABSTRACT:
A photoelectric detecting device reads the alignment mark of a mask and the alignment mark of a wafer with high accuracy. In this device, a photoelectric detecting system for detecting the light reflected from the mask and a photoelectric detecting system for detecting the light reflected from the wafer are provided separately from each other to read the two marks with high accuracy. To distinguish between the light reflected from the mask and the light reflected from the wafer, a .lambda./4 plate is positioned between the mask and the wafer. The device also uses a polarized light beam to illuminate the mask and wafer.

REFERENCES:
patent: 3853398 (1974-12-01), Kano
patent: 3865483 (1975-02-01), Wojcik
patent: 4153371 (1979-05-01), Koizumi et al.
patent: 4251129 (1981-02-01), Suzki et al.
patent: 4315201 (1982-02-01), Suzki et al.

Affiliated with

Also associated with

Rating

Photoelectric detecting device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Photoelectric detecting device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Photoelectric detecting device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2128032