Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Junction field effect transistor
Patent
1996-12-05
1998-06-23
Saadat, Mahshid D.
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Junction field effect transistor
257187, 257461, 257462, 257463, H01L 2980, H01L 310288, H01L 31112
Patent
active
057708720
ABSTRACT:
In a light receiving element and a semiconductor device manufacturing method, the low density PN junction is formed by constructing the internal composition of the photodiode with N.sup.+ type diffusion layer, N.sup.- type epitaxial layer, P.sup.- type epitaxial layer, P.sup.+ type deposit layer, and P type Si from the light receiving surface, the vacant layer to be occurred when the photodiode is reverse biased will be widened and the light receiving sensitivity and the frequency characteristic will be improved. Furthermore, since the separation of bipolar elements will be conducted by P.sup.- epitaxial layer, the efficiency in density control at the time of P.sup.- type epitaxial growth can be improved.
REFERENCES:
patent: 5245203 (1993-09-01), Morishita et al.
patent: 5252851 (1993-10-01), Mita et al.
patent: 5382824 (1995-01-01), Popovic
patent: 5418396 (1995-05-01), Mita
patent: 5500550 (1996-03-01), Morishita
Saadat Mahshid D.
Wilson Allan R.
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