Batteries: thermoelectric and photoelectric – Photoelectric – Cells
Patent
1993-12-22
1995-10-10
Weisstuch, Aaron
Batteries: thermoelectric and photoelectric
Photoelectric
Cells
257 55, 257 64, 257 65, 257458, 136249, H01L 31075, H01L 310368, H01L 310376
Patent
active
054567629
ABSTRACT:
The present invention provides photoelectric conversion elements, wherein the long wavelength sensitivity, the fill factor, and the photoelectric conversion efficiency are improved. In order to provide photoelectric conversion elements wherein light deterioration is reduced, the field durability enhanced, and the temperature characteristic improved, a p-layer composed of amorphous silicon type semiconductor containing hydrogen, an i-layer composed of amorphous silicon-germanium type semiconductor containing hydrogen and further including microcrystalline germanium, and an n-layer composed of amorphous silicon type semiconductor containing hydrogen are laminated on a substrate, the i-layer being formed at a substrate temperature from 400.degree. to 600.degree. C. by microwave plasma CVD, the particle diameter of said microcrystalline germanium ranging from 50 to 500 angstroms. Also, the content of microcrystalline germanium varies in the layer thickness direction.
REFERENCES:
patent: 4766008 (1988-08-01), Kodato
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C. Wang et al., Conference Record 21st IEEE Photovoltaic Specialists Conf., May 1990, pp. 1614-1618.
Hattori, Y., et al., "High Efficiency Amorphous Heterojunction Solar Cell Employing ECR-CVD Produced p-type Microcrystalline SiC Film", Technical Digest of the International PVSEC-3, Tokyo, Japan (1987), pp. 171-174.
Hattori, Y., et al., "High-Conductive Wide Band Gap P-Type a-SiC:H Prepared by ECR CVD and Its Application to High Efficiency a-Si Basis Solar Cells," 19th IEEE Photovoltaic Specialists Conference--(1987), pp. 689-694.
Kodato, S., et al., "A High-accuracy Quick-response Optical Power Sensor with uc-Ge: H Thin Film," Sens. Actuators A 28 (1), pp. 63-68.
Naito, E., et al., "Thermoelectric Characteristics & Microcrystalline Ge Thin Film and its Application to Sensors," Inst. of Electrical Engineers of Japan, Senior Technology Research Meeting Materials, pp. 19-28.
Azuma, K., et al., "A-Si Solar Cell by Microwave Plasma CVD," Proc. 50th Scientific Lecture Meeting in the Japan Society of Appl. Physics, p. 566.
Kariya Toshimitsu
Saito Keishi
Canon Kabushiki Kaisha
Weisstuch Aaron
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