Photoelectric conversion device and method of producing the same

Details Photoelectric conversion device and method of producing the same Photoelectric conversion device and method of producing the same

1981-03-23

1983-09-20

Demeo, Palmer C.

Electric lamp and discharge devices

Cathode ray tube

Image pickup tube

427 76, H01J 2945, H01J 3138, B05D 136

Patent

active

044058799

ABSTRACT:
There is disclosed a photoelectric conversion device comprising a transparent substrate; a transparent conductive film formed on said substrate; a photoconductive layer formed of hydrogenated amorphous silicon as an indispensable component and deposited on said transparent conductive film; and a chalcogen glass film formed on said photoconductive layer, wherein said chalcogen glass film includes at least a chalcogen glass layer formed in an atmosphere of inert gas kept at 1.5.times.10.sup.-2 to 1.5.times.10.sup.-1 Torr. As chalcogen glass is preferably used Sb.sub.2 S.sub.3, As.sub.2 S.sub.3, As.sub.2 Se.sub.3 or Sb.sub.2 Se.sub.3. The chalcogen glass film may be a composite film consisting of plural component layers. This invention is very useful to reduce dark current in an image pickup tube and to prevent image inversion in the image pickup tube.

REFERENCES:
patent: 3890525 (1975-06-01), Hirai et al.
patent: 3947717 (1976-03-01), Busanovich et al.
patent: 4255686 (1981-03-01), Maruyama et al.
patent: 4307319 (1981-12-01), Terao et al.

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