Coating processes – Electrical product produced – Welding electrode
Patent
1984-06-13
1987-06-02
Newsome, John H.
Coating processes
Electrical product produced
Welding electrode
136244, 136258, 427 38, 427 74, B05D 512, H01L 2500
Patent
active
046702946
ABSTRACT:
A method for the manufacture of a semiconductor photoelectric conversion device in which a plurality n of semiconductor elements U.sub.1 to U.sub.n are sequentially formed side by side on a substrate and connected in series one after another. The element U.sub.i (i=1, 2, 3, . . . n) comprises a first electrode E.sub.i on the substrate, a non-single-crystal semiconductor laminate member Q.sub.i on the electrode E.sub.i and a second electrode F.sub.i on the laminate member Q.sub.i. The electrode F.sub.j+1 of the element U.sub.j+1 (j=1, 2, . . . (n-1)) is connected via coupling portion K.sub.j to the first electrode E.sub.j. After the formation of a first conductive layer on the substrate, the electrode E.sub.1 to E.sub.n are provided by forming grooves G.sub.1 to G.sub.n-1 in the first conductive layer. A non-single-crystal semiconductor laminate layer forming the laminate members Q.sub.1 to Q.sub.n is formed to cover the electrodes E.sub.1 to E.sub.n and the grooves G.sub.1 to G.sub.n-1, after which grooves O.sub.1 to O.sub.n-1 are cut in the laminate member Q.sub.1 to Q.sub.n. The coupling portions K.sub.1 to K.sub.n-1 are provided by forming a second conductive layer which covers the laminate members Q.sub.1 to Q.sub.n and the grooves O.sub.1 to O.sub.n-1. The electrodes F.sub.1 to F.sub.n are provided by forming isolating portions H.sub.1 to H.sub.n-1 in the second conductive layer.
The second conductive layer, therefor the second electrode F.sub.i is formed by a layered member having a conductive metal oxide layer making contact with the non-single-crystal semiconductor laminate member Q.sub.i and a conductive material layer formed on the metal oxide layer where the conductive material layer of the second electrode F.sub.i is a layer formed of a sublimable material such as chromium or a material consisting principally thereof.
REFERENCES:
patent: 4259433 (1981-03-01), Mizobuchi et al.
patent: 4262186 (1981-04-01), Provancher
patent: 4315096 (1982-02-01), Tyan et al.
patent: 4428110 (1984-01-01), Kim
patent: 4456782 (1984-06-01), Nishiura et al.
Ferguson Jr. Gerald J.
Hoffman Michael P.
Malamud Ronni S.
Newsome John H.
Semiconductor Energy Laboratory Co,. Ltd.
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