Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate
2007-03-27
2007-03-27
Pham, Long (Department: 2814)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Responsive to electromagnetic radiation
C438S060000
Reexamination Certificate
active
11206125
ABSTRACT:
A pinned photodiode with a pinned surface layer formed by a self-aligned angled implant is disclosed. The angle of the implant may be tailored to provide an adequate offset between the pinned surface layer and an electrically active area of a transfer gate of the pixel sensor cell. The pinned surface layer is formed by employing the same mask level as the one employed for the formation of the photodiode region, and then implanting dopants at angles other than zero degrees.
REFERENCES:
patent: 2004/0201072 (2004-10-01), Rhodes
patent: 2005/0230721 (2005-10-01), Patrick
Mouli Chandra
Rhodes Howard
Dickstein & Shapiro LLP
Micro)n Technology, Inc.
Pham Long
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