Photodetectors, optical modules, and optical transmission...

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system

Reexamination Certificate

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C359S248000, C250S214100

Reexamination Certificate

active

07129469

ABSTRACT:
A method is provided to provide a photodetector that can enhance the light receiving sensitivity with a relatively simple structure, and that can maintain a high speed responsiveness. A photodetector having a MSM (Metal-Semiconductor-Metal) structure, including a substrate, a multilayer film that is disposed over the substrate and includes a low refractive index layer and a high refractive index layer that are alternately laminated as a unit cycle. At least one of the low refractive index layer and the high refractive index layer is a photoabsorption layer composed of semiconductor, and a portion that is embedded in the multilayer film, the portion having at least one pair of opposing electrodes within the multilayer film. The multilayer film is formed such that a wavelength region corresponding to a band edge of a photonic band overlaps at least a part of an absorption band of the photoabsorption layer, to thereby delay a group velocity of incidence light Pin with a predetermined wavelength that belongs to the absorption band of the photoabsorption layer.

REFERENCES:
patent: 6396617 (2002-05-01), Scalora
patent: A 05-315637 (1993-11-01), None
“A Novel HMSM Photodetector with Resonant Cavity for Short Haul Communications” by Xiying Chen, et al.; IEEE MTT-S Digest, pp. 1281-1284, 2002.
“High-Frequency, High-Efficiency MSM Photodetectors” by Jinwook Burm, et al.; IEEE Journal of Quantum Electronics, vol. 31, No. 8, pp. 1504-1509, Aug. 1995.

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