Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation
Patent
1996-07-24
2000-10-03
Saadat, Mahshid
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Electromagnetic or particle radiation
257 81, 257 84, 257444, 257448, H01L 3100, H01L 3112
Patent
active
061277150
ABSTRACT:
Si.sub.3 N.sub.4 having high humidity resistance is used as a surface protecting insulating film covering a metal layer. At a bonding pad portion where metal layer is directly exposed, coverage is provided by anti-corrosion metal portion consisting of a titanium-tungsten alloy layer and gold layers. At a signal processing circuit portion, light intercepting structure and interconnection are provided similarly by titanium-tungsten alloy layer and gold layer. Thus humidity resistance of a photodetector element containing a circuit element is improved, and the gold layer allows direct die-bonding of a laser chip or the like. Further, since light intercepting structure and interconnection can be provided at the signal processing circuit portion simultaneously with the formation of gold layer for the bonding pad portion, the number of manufacturing steps can be reduced.
REFERENCES:
patent: 4266237 (1981-05-01), Hendrickson
patent: 5177581 (1993-01-01), Kubo et al.
patent: 5216491 (1993-06-01), Yamamoto et al.
patent: 5324958 (1994-06-01), Mead et al.
patent: 5371384 (1994-12-01), Wada
patent: 5416359 (1995-05-01), Oda
patent: 5483096 (1996-01-01), Kuhara
patent: 5488251 (1996-01-01), Mizutani et al.
patent: 5502335 (1996-03-01), Oda
patent: 5506434 (1996-04-01), Yonemoto
patent: 5600157 (1997-02-01), Abiko et al.
patent: 5663598 (1997-09-01), Lake et al.
patent: 5665639 (1997-09-01), Seppala et al.
Kubo Masaru
Yamamoto Motohiko
Saadat Mahshid
Sharp Kabushiki Kaisha
Wilson Allan R.
LandOfFree
Photodetector element containing circuit element and manufacturi does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Photodetector element containing circuit element and manufacturi, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Photodetector element containing circuit element and manufacturi will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-198430