Photodetector array having high pixel density

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation

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257459, 257613, H01L 2714, H01L 3100

Patent

active

053898125

ABSTRACT:
Photoconductive semiconductor material is injected into narrow and closely paced cylindrical channels in an insulating matrix plate to form pixel elements of a high resolution photodetector array. A transparent conductive layer is deposited on one surface of the photoconductor array while light reflecting pads are formed on the elements at the opposite surface. Subsequently, a layer of light modulating material and a transparent conductive layer are deposited on the opposite surface to obtain a high resolution spatial light modulator.

REFERENCES:
patent: 5229626 (1993-07-01), Ebitani et al.
patent: 5264722 (1993-11-01), Tonucci et al.
patent: 5298432 (1994-03-01), Sayyah

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