Photodetector and spectrometer using the same

Details Photodetector and spectrometer using the same Photodetector and spectrometer using the same

2006-07-25

2006-07-25

Evans, F. L. (Department: 2877)

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

Reexamination Certificate

active

07081955

ABSTRACT:
A spectrometer is configured by using a photodetector1B which comprises a semiconductor substrate10having an upper surface10a, a photodiode array11having a plurality of photodiodes12aligned on the upper surface10aof the substrate10, and a light input section13including an opening formed in a predetermined positional relationship to the photodiode array11; and a main body2having a plate portion20and support portions21and22mounted on the substrate10of the photodetector1B. The spectrometer is provided with a lens23protruded from a lower face20bof the plate portion20and a planar aberration-reduced blazed reflection diffraction grating24provided on an upper face20aof the plate portion20for separating incident light having entered through the light input section13and passed through the lens23into its spectral components, and configured to detect the spectral components with the photodiode array11. Thus, a photodetector capable of improving the positioning accuracy of components when it is applied to a spectrometer and the spectrometer using the same are realized.

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