Photoactive coumarin sulfonate compounds

Details Photoactive coumarin sulfonate compounds Photoactive coumarin sulfonate compounds

1997-03-07

1998-04-14

Powers, Fiona T.

Organic compounds -- part of the class 532-570 series

Organic compounds

Diazooxide or diazotate

430170, 430192, 430193, 5263471, 534560, C07D31120, C07D33506

Patent

active

057392951

ABSTRACT:
A new class of 3-diazo-3,4-dihydrocoumarin compounds which are useful as photoactive compounds in a wide variety of applications including photoresists and other opto-electronic applications are disclosed and claimed. Preferred embodiments include 6-sulfonyl-3-diazo-4-oxo-3,4-dihydrocoumarin esters. These compounds exhibit very high photosensitivity in the deep ultraviolet (DUV) region (ca. 250 nm), and therefore, are useful as photoactive compounds in DUV photoresist formulations.

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