Photoactive coumarin derivatives

Details Photoactive coumarin derivatives Photoactive coumarin derivatives

1997-03-07

1998-03-10

Powers, Fiona T.

Organic compounds -- part of the class 532-570 series

Organic compounds

Diazooxide or diazotate

534557, 430170, 430192, 430193, C07D31120, C07D33506

Patent

active

057262950

ABSTRACT:
A new class of 3,4-dihydrocoumarin derivatives which are useful as photoactive compounds in a wide variety of applications including photoresists and other opto-electronic applications are disclosed and claimed. Preferred embodiments include ether, ester, carbonate, and sulfonate derivatives of 5-hydroxy, 6-hydroxy, and 7-hydroxy-3-diazo-4-oxo-3,4-dihydrocoumarins. These compounds exhibit very high photosensitivity in the deep ultraviolet (DUV) region (ca. 250 nm), and therefore, are useful as photoactive compounds in DUV photoresist formulations.

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