Organic compounds -- part of the class 532-570 series – Organic compounds – Diazooxide or diazotate
Patent
1995-05-24
1997-04-08
Powers, Fiona T.
Organic compounds -- part of the class 532-570 series
Organic compounds
Diazooxide or diazotate
549 78, 549502, C07C24512, C07D30736, C07D33310, C07D33328
Patent
active
056189320
ABSTRACT:
A new photoactive compound for use in the formulation of a photoresist comprises a bisphenol compound having an alkyl linkage substituted with a heterocyclic group. The new photoactive compound may be admixed with an alkali soluble resin to formulate a photoresist composition. The new photoactive compounds exhibit enhanced long term solubility in conventional photoresist solvents.
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Pandya Ashish
Zampini Anthony
Goldberg Robert L.
Powers Fiona T.
Shipley Company L.L.C.
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