Catalyst – solid sorbent – or support therefor: product or process – Catalyst or precursor therefor – Organic compound containing
Patent
1989-12-27
1991-10-08
Garvin, Patrick P.
Catalyst, solid sorbent, or support therefor: product or process
Catalyst or precursor therefor
Organic compound containing
502150, 502162, 502168, 502172, 502169, B01J 3102
Patent
active
050554395
ABSTRACT:
A composition including an initiator which generates acid upon exposure to radiation in the presence of a sensitizer. The composition may be mixed with an acid sensitive polymer or prepolymer to make a visible light or laser imageable photoresist. The sensitizer has phenylethynyl and methoxy substituents which, when properly positioned, allow it to utilize all of the visible argon ion laser lines.
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Allen Robert D.
Hinsberg, III. William D.
Simpson Logan L.
Twieg Robert J.
Wallraff Gregory M.
Garvin Patrick P.
Gunter Jr. Charles D.
International Business Machines - Corporation
Irzinski E. D.
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