X-ray or gamma ray systems or devices – Specific application – Diffraction – reflection – or scattering analysis
Patent
1997-03-25
1998-10-27
Wong, Don
X-ray or gamma ray systems or devices
Specific application
Diffraction, reflection, or scattering analysis
378 71, G01N 2320
Patent
active
058287248
ABSTRACT:
An x-ray diffraction system for determining stress in integrated circuit materials includes a source of x-rays (3) that are directed toward a sample holding mechanism for diffracting from the test sample (8). An x-ray detector (14) is arranged for detecting high back reflected diffracted x-ray intensity data representing stress in the test sample. A two-dimensional detection and storage arrangement (24) is arranged for detecting and storing the data representing stress in the test sample. A data processor (2) accesses the stored data from the two-dimensional detection and storage arrangement and processes the data representing stress in the test sample to determine stress in the test sample.
REFERENCES:
patent: 4489425 (1984-12-01), Borgonovi
patent: 4686631 (1987-08-01), Ruud
patent: 5125016 (1992-06-01), Korhonen, et al.
patent: 5148458 (1992-09-01), Ruud
patent: 5414747 (1995-05-01), Ruud et al.
patent: 5629524 (1997-05-01), Stettner et al.
patent: 5724401 (1998-03-01), Kurtz et al.
Noyan, I.C. and Cohen, J.B., "Residual Stress," Springer-Verlag, ISBN 0-387-96378-2, (1987), pp. 4-7, 74-110, and 116-125.
Noyan, I. C. and Goldsmith, C.C., "Thermal Stress Relaxation in Vapor Deposited Thin Films," Advances in X-ray Analysis, 34, 587, (1991).
Crowder, C.E. et al., "The Measurement of Triaxial Residual Stress in Polymer-Coated Aluminum Circuitry in Microchip Modules," Advances in X-ray Analysis, 36, 231, (1993).
Advanced Technology & Materials Inc.
Hultquist Steven J.
Wong Don
Zitzmann Oliver A. M.
LandOfFree
Photo-sensor fiber-optic stress analysis system does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Photo-sensor fiber-optic stress analysis system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Photo-sensor fiber-optic stress analysis system will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1620151