Photo-receiving device with light guide

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation

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257436, 385130, H01L 310232

Patent

active

059457201

ABSTRACT:
A high-speed, high-sensitivity photo-receiving device has a light-absorbing substrate, on which a pair of electrodes are provided. An insulative optical guide is located over an exposed surface portion of the substrate constituting an optical window. The optical guide is permeable to incident light, and the width of the optical guide does not exceed the wavelength of the incident light.

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H. Sugimura, et al. "Tip-induced anodization of titanium surfaces by scanning tunneling microscopy: a humidity effect on nanolithography"; Applied Physics Letters; vol. 63, No. 9.; Aug. 30, 1993; pp. 1288-1290, XP002023749.
Chia-Chi Wang, et al. "Ultrafast, All-Silicon Light Modulator"; Optics Letter; vol. 19, No. 18; Sep. 15 1994; pp. 1453-1455, XP000472099.
U. Prank et al. "Metal-Semiconductor-Metal Photodetector with Integrated Fabry-Perot Resonator for Wavelength Demultiplexing High Bandwidth Receivers"; Applied Physics Letters; vol. 62, No. 2, Jan. 11, 1993; pp. 129-130, XP000332226.
T. Itatani et al. "Ultrafast metal-semiconductor-metal photoconductive switches fabricated using an atomic force microscope"; Japanese Journal of Applied Physics, Part 1; vol. 35; Feb. 1996; pp. 1387-1389; XP000614759.

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