Photo mask and method for manufacturing semiconductor device...

Details Photo mask and method for manufacturing semiconductor device... Photo mask and method for manufacturing semiconductor device...

2008-05-07

2010-11-23

Huff, Mark F (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

C716S030000

Reexamination Certificate

active

07838181

ABSTRACT:
A photo mask includes a dot pattern formed between a line pattern and an island pattern. Methods of making a semiconductor device employing such a photo mask improves yield and productivity of the device.

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patent: 2009/0233183 (2009-09-01), Moon
patent: 07-248612 (1995-09-01), None
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Notice of Rejection for Korean Application No. 10-2007-0122952, dated Apr. 29, 2009.

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