Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate
2009-04-23
2010-12-21
Huynh, Andy (Department: 2818)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
C438S087000, C438S309000, C257S292000, C257SE27132
Reexamination Certificate
active
07855094
ABSTRACT:
A photo-detector, in which metal wiring for connecting electrodes is arranged on a planarized surface and thus the metal wiring arrangement is simplified, and a method of manufacturing the same are provided. The photo-detector includes a multi-layer compound semiconductor layer formed on a compound semiconductor substrate. A number of p-n junction diodes are arranged in a regular order in a selected region of the compound semiconductor layer, and an isolation region for individually isolating the p-n junction diodes is formed by implanting impurity ions in the multi-layer compound semiconductor layer. The isolation region and the surface of the compound semiconductor layer are positioned on the same level. The isolation region may be a Fe-impurity region.
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Hong Seon Eui
Kim Bo Woo
Kim Ho Young
Kim Yong Won
Nam Eun Soo
Electronics and Telecommunications Research Institute
Huynh Andy
Ladas & Parry LLP
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