Phosphorus-nitrogen-oxygen composition and method for making suc

Compositions: coating or plastic – Coating or plastic compositions – Inorganic materials only

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252951, 423302, H01B 300, H01B 3/02

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active

042895391

ABSTRACT:
A composition is described which comprises amorphous phosphorus-nitrogen-oxygen material having excellent thermal stability and low reactivity to a wide variety of chemicals. The material is manufactured using a chemical vapor deposition process. The reaction chamber is maintained at a temperature between about 400.degree.-900.degree. C. with a suitable substrate placed therein. Reaction gases containing phosphorus-nitrogen-bearing compounds and a source of oxygen are passed through the chamber to deposit the phosphorus-nitrogen-oxygen film onto the substrate.

REFERENCES:
patent: 1634795 (1927-07-01), Miner
patent: 2884318 (1959-04-01), Christian
patent: 3859418 (1975-01-01), Ulrich
patent: 3931039 (1976-01-01), Yamashita et al.
patent: 3972838 (1976-08-01), Yamashita et al.
Chemical Abstracts, vol. 80:53416y, 1974.
Chemical Abstracts, vol. 72:123,531t.

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