Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Processes of preparing a desired or intentional composition...
Reexamination Certificate
2008-05-06
2008-05-06
Niland, Patrick (Department: 1796)
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
Processes of preparing a desired or intentional composition...
C106S287110, C427S096200, C427S099200, C427S099400, C428S446000, C524S588000, C524S706000, C524S858000, C525S474000, C525S477000, C257S506000
Reexamination Certificate
active
07368491
ABSTRACT:
An objective of the present invention is to provide a phosphorous-containing siliceous material having a specific permittivity of not more than 3.5. The phosphorus-containing silazane composition according to the present invention is characterized by comprising a polyalkylsilazane and at least one phosphorus compound in an organic solvent. A phosphorus-containing siliceous film may be formed by coating the composition onto a substrate to form a film which is then prebaked at a temperature of 50 to 300° C. and is then baked in an inert atmosphere at a temperature of 300 to 700° C. The phosphorus compound according to the present invention is preferably a pentavalent phosphoric ester or phosphazene compound.
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English Language Abstract of JP 2-12916.
English Language Abstract of JP 2-22475.
English Language Abstract of JP 4-164923.
English Language Abstract of JP 6-283507.
English Language Abstract of JP 8-176510.
English Language Abstract of JP 10-183063.
English Language Abstract of JP 11-105186.
English Language Abstract of JP 2001-308090.
English Language Abstract of JP 2001-319927.
English Language Abstract of JP 2002-367980.
English Language Abstract of JP 2002-75982.
English Language Abstract of JP 2004-331733.
Machine Language English Translation from JPO of JP 6-283507.
Machine Language English Translation from JPO of JP 8-176510.
Machine Language English Translation from JPO of JP 10-183063.
Machine Language English Translation from JPO of JP 11-105186.
Machine Language English Translation from JPO of JP 2001-308090.
Machine Language English Translation from JPO of JP 2002-75982.
Aoki Hiroyuki
Aoki Tomoko
AZ Electronic Materials USA Corp.
Kass Alan P.
Niland Patrick
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