Liquid purification or separation – Processes – Ion exchange or selective sorption
Patent
1992-07-01
1993-08-03
Spitzer, Robert
Liquid purification or separation
Processes
Ion exchange or selective sorption
210688, 423342, B01D 1500
Patent
active
052326020
ABSTRACT:
The present invention relates to a method for the purification of tetrachlorosilane used for the manufacture of electronic grade silicon and, more particularly, to a method for removing trace impurities of phosphorus. The method involves contacting liquid tetrachlorosilane with activated charcoal. The process is effective in reducing the phosphorus levels in the tetrachlorosilane to the parts per trillion range. The process can be run as a continuous or batch process with easy separation of the activated charcoal. containing the phosphorus contaminate from the tetrachlorosilane.
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Brink Robert G.
Deitering Norman H.
Greene Michael H.
Nguyen Kimmai T.
Boley William F.
Hemlock Semiconductor Corporation
Spitzer Robert
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