Phosphorous removal from chlorosilane

Details Phosphorous removal from chlorosilane Phosphorous removal from chlorosilane

1997-04-28

1998-03-03

Shaver, Paul F.

Organic compounds -- part of the class 532-570 series

Organic compounds

Silicon containing

423342, C07F 708

Patent

active

057236445

ABSTRACT:
A method for the purification of chlorosilanes used for the manufacture of electronic-grade silicon and more particularly to a method for removing trace contaminants of phosphorus. The method comprises contacting a mixture comprising a chlorosilane and a phosphorus contaminant with an absorbent comprising a copper or compound of copper supported on silica.

REFERENCES:
patent: 2971607 (1961-02-01), Caswell
patent: 3188168 (1965-06-01), Bradley
patent: 4099936 (1978-07-01), Tarancon
patent: 4156689 (1979-05-01), Ashby et al.
patent: 4409195 (1983-10-01), Darnell et al.
patent: 4481178 (1984-11-01), Kray
patent: 5232602 (1993-08-01), Brink et al.
patent: 5567836 (1996-10-01), Diaz et al.

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