Phosphorous-nitrogen based glasses for the passivation of III-V

Details Phosphorous-nitrogen based glasses for the passivation of III-V Phosphorous-nitrogen based glasses for the passivation of III-V

1983-04-11

1985-10-08

James, Andrew J.

Compositions: ceramic

Ceramic compositions

Glass compositions, compositions containing glass other than...

357 2, 357 2315, 357 61, 357 73, 501 40, H01L 2724, H01L 2978, H01L 29161, H01L 2934

Patent

active

045463727

ABSTRACT:
A semiconductor article having a phosphorous nitrogen passivating film thereon. Particularly, an insulated gate field effect transistor device operating in the inversion mode, wherein the device comprises an essentially oxygen-free, amorphous, phosphorous-nitrogen glass passivating film deposited on a III-V semiconductor material.

REFERENCES:
patent: 2952599 (1960-09-01), Suchet
patent: 3424661 (1969-01-01), Androshuk et al.
patent: 3549411 (1970-12-01), Bean et al.
patent: 3931039 (1976-01-01), Yamashita et al.
patent: 4172906 (1979-10-01), Pancholy
patent: 4223048 (1980-09-01), Engle, Jr.
patent: 4226898 (1980-10-01), Ovshinsky et al.
patent: 4279723 (1981-07-01), Osada et al.
patent: 4289539 (1981-09-01), Li
patent: 4453174 (1984-06-01), Kawasaki et al.
Miller and Shaw, Phosphorus-Nitrogen Compounds, Part III-Phosphams, Jrnl of Chem. Soc., Jun., 1963, p. 3233.
Vebrek and Roos, Dielectric Properties of Phosphorus Nitride Films, Jrnl of Chem. Solids, 1976, vol. 37, p. 554.
Vebrek, Iqbal, Brunner and Scharli, Preparation and Properties of Amorphous Nitride Prepared in a Low-Pressure Plasma, Philosophical Magazine B, 1981, vol. 43, No. 3, 527-547.

Affiliated with

Also associated with

Rating

Phosphorous-nitrogen based glasses for the passivation of III-V does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Phosphorous-nitrogen based glasses for the passivation of III-V , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Phosphorous-nitrogen based glasses for the passivation of III-V will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2223189