Phenol novolak resin, production process thereof, and...

Details Phenol novolak resin, production process thereof, and... Phenol novolak resin, production process thereof, and...

2005-09-06

2005-09-06

Chu, John S. (Department: 1752)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Mixing of two or more solid polymers; mixing of solid...

C525S492000, C528S155000, C430S191000, C430S192000, C430S193000

Reexamination Certificate

active

06939926

ABSTRACT:
A phenol novolak resin has a peak intensity ratio of ortho-ortho bond (o-o)/ortho-para bond (o-p)/para-para bond (p-p) in a resin structure not substantially varying in each molecular weight fraction and has a weight average molecular weight (Mw) of 3000 to 20000 in terms of polystyrene, which peak intensity ratio is detected by13C-NMR analysis. The phenol novolak resin can form both dense pattern and isolation pattern with good shapes in the formation of a fine resist pattern of not more than 0.35 μm and has satisfactory sensitivity, definition, and focal depth range properties, and has a resin composition being uniform in each molecular weight fraction. A process for producing the phenol novolak resin, and a positive photoresist composition using the resin are also provided.

REFERENCES:
patent: 4837121 (1989-06-01), Blakeney et al.
patent: 5130410 (1992-07-01), Zampini
patent: 5196289 (1993-03-01), Jeffries, III et al.
patent: 5234795 (1993-08-01), Jeffries, III et al.
patent: 5413894 (1995-05-01), Sizensky et al.
patent: 5604077 (1997-02-01), Kono et al.
patent: 6642345 (2003-11-01), Yuasa et al.

Affiliated with

Also associated with

Rating

Phenol novolak resin, production process thereof, and... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Phenol novolak resin, production process thereof, and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Phenol novolak resin, production process thereof, and... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3374076