Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1991-05-13
1992-09-08
Turner, Samuel A.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356360, 356376, 382 26, 364575, G01B 1102
Patent
active
051462931
ABSTRACT:
A projected fringe interferometer for measuring the topography of an object periodically steps the phase angle between a pair of light beams emanating from a common source. The steps are .pi./2 radians (90.degree.) apart and at each step a video image of the fringes is recorded and stored. Photodetectors measure either the phase angle .theta. of the beams or 2.theta. either of which is used to control one of the light beams so the 90.degree. .theta. is accurately maintained. A camera, a computer, a phase controller and a phase modulator established closed-loop control of .theta.. Measuring the phase map of a flat surface establishes a calibration reference.
REFERENCES:
patent: 3520607 (1970-07-01), Zoot
patent: 4639139 (1987-01-01), Wyant et al.
patent: 4677302 (1987-06-01), Chiu et al.
patent: 4695163 (1987-09-01), Schachar
patent: 4732483 (1988-03-01), Biegen
patent: 5042949 (1991-08-01), Greenberg et al.
W. T. Welford, "Some Applications of Projected Fringes", Optica Aeta, vol. 16, pp. 371-379 (1969).
Beheim Glenn
Mercer Carolyn R.
Keesee LaCharles P.
Mackin James A.
Miller Guy M.
Shook Gene E.
The United States of America as represented by the Administrator
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