Phase-shifting point diffraction interferometer

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer

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356354, 356359, G01B 902

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active

058352171

ABSTRACT:
Disclosed is a point diffraction interferometer for evaluating the quality of a test optic. In operation, the point diffraction interferometer includes a source of radiation, the test optic, a beam divider, a reference wave pinhole located at an image plane downstream from the test optic, and a detector for detecting an interference pattern produced between a reference wave emitted by the pinhole and a test wave emitted from the test optic. The beam divider produces separate reference and test beams which focus at different laterally separated positions on the image plane. The reference wave pinhole is placed at a region of high intensity (e.g., the focal point) for the reference beam. This allows reference wave to be produced at a relatively high intensity. Also, the beam divider may include elements for phase shifting one or both of the reference and test beams.

REFERENCES:
Kwon, Osak Y., "Multichannel Phase-shifted Interferometer," Reprinted with . . . permission from Optics Letters, vol. 9 (2), pp. 59-61,Feb. 1984, Palo Alto, California.
Mercer, Carolyn R. & Creath, Katherine, "Liquid-crystal Point-diffraction Interferometer," Optic Letters, vol. 19, No. 12, Jun. 15, 1994.
Medecki, H., et al., "A Phase-Shifting Point Diffraction Interferometer," Optics Letters, Oct. 1, 1996.
W. P. Linnik, Proceedings of the Academy of Sciences of the U.S.S.R. 1, 208 (1933).
R.N. Smartt, W.H. Steel, Japan. J. of Appl. Phys. 14, (Suppl. 14-1), 351 (1975).
K. A. Goldberg, R. Beguiristain, J. Bokor, H. Medecki, D. T. Attwood, K. Jackson, E. Tejnil, G. E. Sommargren, J. Vac. Sci. Tech. B 13, 2923 (1995) .

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