Phase-shifting interferometry in the presence of vibration

Details Phase-shifting interferometry in the presence of vibration Phase-shifting interferometry in the presence of vibration

2011-05-24

2011-05-24

Connolly, Patrick J (Department: 2877)

Optics: measuring and testing

By light interference

Having partially reflecting plates in series

Reexamination Certificate

active

07948639

ABSTRACT:
A phase-shifting interferometry (PSI) method and corresponding system including: (i) recording an interferogram for each phase in a sequence of phases between test light reflected from a test surface and reference light reflected from a reference surface, the test and reference light being derived from a common source, each interferogram corresponding to an intensity pattern produced by interfering the reflected test light with the reflected reference light, the interferograms defining an interferometry signal for each of different transverse locations of a cavity defined by the test and reference surfaces, each interferometry signal including a series of intensity values corresponding to the sequence of phases, with the difference between each pair of phases in the sequence defining a corresponding phase shift increment; (ii) calculating an initial phase map for the cavity based on at least some of the recorded interferograms; (iii) calculating an estimate for each of at least some of the phase shift increments based on the initial phase map and at least some of the recorded interferograms; and (iv) calculating an improved phase map based on the calculated estimates for the phase shift increments and at least some of the recorded interferograms.

REFERENCES:
patent: 4594003 (1986-06-01), Sommargren
patent: 5999263 (1999-12-01), Deck et al.
patent: 6304330 (2001-10-01), Millerd et al.
patent: 6359692 (2002-03-01), Groot
patent: 6587212 (2003-07-01), Barber et al.
patent: 6717680 (2004-04-01), Kuchel et al.
patent: 6924898 (2005-08-01), Deck
patent: 6995848 (2006-02-01), Deck
patent: 7796273 (2010-09-01), Deck
patent: 2003/0160968 (2003-08-01), Deck
patent: 2003/0164951 (2003-09-01), Deck
patent: 2004/0174526 (2004-09-01), Tang
patent: 2005/0046864 (2005-03-01), Millerd et al.
patent: 2008/0180679 (2008-07-01), de Groot
patent: 2008/0266571 (2008-10-01), Deck
patent: 2010/0118312 (2010-05-01), Deck
patent: 2010/0118313 (2010-05-01), Deck
International Search Report for International Application No. PCT/US2009/063853 dated Jun. 18, 2010.
Xin Chen et al., “Phase-shifting interferometry with uncalibrated phase shifts”,Applied Optics, vol. 39, No. 4, pp. 585-591 (Feb. 1, 2000).
C. T. Farrell et al., “Phase step measurement and variable step algorithms in phase-shifting interferometry”,Meas. Sci. Technol., vol. 3, pp. 953-958 (1992).
C. T. Farrell et al., “Phase-step insensitive algorithms for phase-shifting interferometry”,Meas. Sci. Technol., vol. 5, pp. 648-652 (1994).
Kenneth A. Goldberg et al., “Fourier-transform method of phase-shift determination”,Applied Optics, vol. 40, No. 17, pp. 2886-2894 (Jun. 10, 2001).
J.E. Greivenkamp, “Generalized data reduction for heterodyne interferometry”,Optical Engineering, vol. 23, No. 4, pp. 350-352 (Jul./Aug. 1984).
M. Kuchel, “The new Zeiss interferometer”,SPIE, vol. 1332, pp. 655-663 (1990).
Daniel Malacara et al., “Spatial Linear and Circular Carrier Analysis”,Interferogram Analysis for Optical Testing, Marcel Dekker, Inc., New York, pp. 285-335 (1998).
Katsuyuki Okada et al., “Simultaneous calculation of phase distribution and scanning phase shift in phase shifting interferometry”,Optics Communications, vol. 84, No. 3, 4; pp. 118-124 (Jul. 15, 1991).
Mitsuo Takeda et al., “Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry”,J. Opt. Soc. Am., vol. 72, No. 1, pp. 156-160 (Jan. 1982).
R. Smythe et al., “Instantaneous phase measuring interferometry”,Proc. Soc. Phot. Opt. Eng., vol. 429, pp. 16-21 (1983).
Peter L. Wizinowich, “Phase shifting interferometry in the presence of vibration: a new algorithm and system”,Applied Optics, vol. 29, No. 22, pp. 3271-3279 (Aug. 1, 1990).

Affiliated with

Also associated with

Rating

Phase-shifting interferometry in the presence of vibration does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Phase-shifting interferometry in the presence of vibration, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Phase-shifting interferometry in the presence of vibration will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2651131