Phase shifting diffraction interferometer

Details Phase shifting diffraction interferometer Phase shifting diffraction interferometer

1994-11-28

1996-08-20

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356351, 356360, 356345, G01B 902

Patent

active

055484034

ABSTRACT:
An interferometer which has the capability of measuring optical elements and systems with an accuracy of .lambda./1000 where .lambda. is the wavelength of visible light. Whereas current interferometers employ a reference surface, which inherently limits the accuracy of the measurement to about .lambda./50, this interferometer uses an essentially perfect spherical reference wavefront generated by the fundamental process of diffraction. This interferometer is adjustable to give unity fringe visibility, which maximizes the signal-to-noise, and has the means to introduce a controlled prescribed relative phase shift between the reference wavefront and the wavefront from the optics under test, which permits analysis of the interference fringe pattern using standard phase extraction algorithms.

REFERENCES:
patent: 4353650 (1982-10-01), Sommargren
patent: 4872755 (1989-10-01), Kuchel
patent: 5076695 (1991-12-01), Ichihara

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