Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1989-12-01
1991-01-15
Evans, F. L.
Optics: measuring and testing
By polarized light examination
With light attenuation
250237G, G01B 1124
Patent
active
049848933
ABSTRACT:
A phase shifting projector includes an incandescent lamp, a heat-absorbing filter filtering infrared light from the incandescent lamp, a condensing lens receiving light from the filter, a transparent slide having a sinusoidal grating thereon, a projecting lens, a rotatable transparent plate disposed between the slide and the projecting lens, a test surface on which the grating is projected, and a stepper motor connected to the transparent plate for rotating it about an axis generally parallel to a line of the grating to modulate the phase of the grating image projected on the test surface.
REFERENCES:
patent: 4212073 (1980-07-01), Balasubramanian
patent: 4231662 (1980-11-01), Feinland et al.
patent: 4657393 (1987-04-01), Stern
patent: 4657394 (1987-04-01), Halioua
"Use of Electronic Phase Measurement Techniques In Optical Testing", by J. Wyant and R. Shagam, Proceedings of ICO-11 Conference, Madrid, Spain, 1978, pp. 659-662.
"Optical Frequency Shifter For Heterodyne Interferometers Using Multiple Rotating Polarization Retarders", by R. Shagam and J. Wyant, Applied Optics, vol. 17, No. 19, Oct. 1978, pp. 3034-3035.
"Interferometric Optical Metrology: Basic Principles and New Systems", by J. Wyant, Laser Focus, May 1982, pp. 65-71.
"Adaptation of a Parallel Architecture Computer to Phase Shifted Moire Interferometry", by A. Boehnlein and K. Harding, SPIE, vol. 728, Optics, Illumination, and Image Sensing for Machine Vision, 1986, pp. 183-194.
Evans F. L.
Wyko Corporation
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