Phase shift measurement using transmittance spectra

Details Phase shift measurement using transmittance spectra Phase shift measurement using transmittance spectra

2007-08-07

2007-08-07

Rosenberger, Richard A. (Department: 2877)

Optics: measuring and testing

Dimension

C356S636000

Reexamination Certificate

active

11028894

ABSTRACT:
An apparatus and method for determining a physical parameter of features on a substrate by illuminating the substrate with an incident light covering an incident wavelength range Δλ, e.g., from 190 nm to 1000 nm, where the substrate is at least semi-transparent. A response light received from the substrate and the feature is measured to obtain a response spectrum of the response light. Further, a complex-valued response due to the feature and the substrate is computed and both the response spectrum and the complex-valued response are used in determining the physical parameter. A direct approximate phase measurement is provided when the response light is transmitted light.

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