Phase shift mask and its manufacturing method

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask


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430296, 430322, 430323, 430394, G03F 900




A method for manufacturing a phase shift mask of the invention comprises a process of protecting a side wall of an opening in a light-damping film by means of a resist and then etching the light-damping film to be so thin as a halftone film.

patent: 4890309 (1989-12-01), Smith et al.
patent: 5380609 (1995-01-01), Fujita et al.


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