Phase shift interferometer

Details Phase shift interferometer Phase shift interferometer

2008-05-27

2008-05-27

Lee (Andrew), Hwa S (Department: 2886)

Optics: measuring and testing

By light interference

Having polarization

C356S511000

Reexamination Certificate

active

07379188

ABSTRACT:
A phase shift interferometer (100) has an illuminating optical system (200) that emits a P-wave and an S-wave, a collimator lens (110), a reference half mirror (120), a pinhole plate (130) having a pinhole (131), and a phase shift interference fringe acquiring section (300) that allows an object light and a reference light contained in the light beam passed through the pinhole (131) interfere with each other in four different phases to acquire interference fringes with different phases. In the S-wave, only the reference light (SR) reflected by the reference half mirror (120) is passed through the pinhole (131), and the object light (SM) reflected by a surface-to-be-measured is blocked by the pinhole plate (130). In the P-wave, only the object light (PM) reflected by the surface-to-be-measured is passed through the pinhole (131), and the reference light (PR) reflected by the reference half mirror (120) is blocked by the pinhole plate (130).

REFERENCES:
patent: 2005/0270530 (2005-12-01), Wada et al.
patent: 11-337321 (2005-07-01), None

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