Phase shifiting mask and method of manufacturing the same

Details Phase shifiting mask and method of manufacturing the same Phase shifiting mask and method of manufacturing the same

1997-05-22

1998-10-20

Rosasco, S.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

G03F 900

Patent

active

058244395

ABSTRACT:
A phase shifting mask includes a transparent substrate having a groove; a light-shading layer formed within the groove to shade an incident light; and a phase shifting layer formed on the light-shading layer and a portion of the transparent substrate for shifting a phase of the incident light.

REFERENCES:
patent: 5290647 (1994-03-01), Miyazaki et al.
patent: 5300378 (1994-04-01), Minami
patent: 5300379 (1994-04-01), Dao et al.
patent: 5437947 (1995-08-01), Hur et al.
patent: 5705300 (1998-01-01), Bae

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