Phase modulation of grazing incidence interferometer

Details Phase modulation of grazing incidence interferometer Phase modulation of grazing incidence interferometer

1980-06-02

1982-04-20

Corbin, John K.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

G01B 1124

Patent

active

043256376

ABSTRACT:
Phase is modulated in a grazing incidence interferometer by modulating the incidence angle and spacing the test surface far enough from the reference surface so that the incidence angle modulation changes the phase relationship between the interferring beam reflected from the test surface and the reference beam reflected from the reference surface substantially more than it changes the sensitivity of the interferometer to surface variations between the reference and test surfaces. The preferred way of accomplishing this is with tiltable mirror 15 modulating the incidence angle slightly relative to prism 11 with its reference surface 12 and test surface 13 spaced from reference surface 12 in interferometer 10. An electromagnetic element 16 such as a galvanometer is preferred for tilting mirror 15.

REFERENCES:
patent: 2518647 (1950-08-01), Teeple et al.
patent: 4072423 (1978-02-01), Kimura et al.
Synborski, Edward, "The Interferometric Analysis of Flatness by Eye and Computer", Proceedings of the Society of Photo-Optical Instrumentation Engineers, vol. 135, pp. 104-110, Apr. 10-11, 1978.
Bruning; J. H. et al, "Digital Wavefront Measuring Interferometer for Testing Optical Surfaces and Lenses" Applied Optics, vol. 13, pp. 2693-2703, Nov. 1974.
TROPEL, Inc. pamphlet: "System 9,000".

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