Coherent light generators – Particular active media – Semiconductor
Patent
1990-12-14
1992-02-04
Epps, Georgia
Coherent light generators
Particular active media
Semiconductor
372 45, 372 46, H01S 319
Patent
active
050864300
ABSTRACT:
A method of fabricating an array of vertical-cavity, surface-emitting lasers that allows the lasers to be phase-locked and the resulting device. The growth of the laterally unpatterned epitaxial vertical-cavity structure includes an upper mirror which is only partially reflective. A gold layer supplies the final reflectivity. A grip pattern is then etched in the gold layer, and a lower reflectivity metal layer is deposited over the gold layer and into the grid. The lower reflectivity metal both provides a common contact to the laser elements but also degrades the mirror reflectivity in the grid portion. The lower reflectivity prevents the grid portion from lasing. The areas within the grid pattern are separate lasers, but they are so closely separated that they lase coherently among themselves.
REFERENCES:
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Kapon Elyahou
Orenstein Meir
Bell Communications Research Inc.
Epps Georgia
Guenzer Charles S.
Suchyta Leonard Charles
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