Optics: measuring and testing – By polarized light examination – With birefringent element
Patent
1998-03-05
2000-02-01
Kim, Robert H.
Optics: measuring and testing
By polarized light examination
With birefringent element
356357, 356359, G01B 902
Patent
active
060209658
ABSTRACT:
A phase interference microscope, comprising a light source for emitting coherent light with a constant wavelength, an interference optical system for splitting the light emitted from the light source into two light beams, irradiating one of the split light beams onto a sample and the other split light beam onto a reference mirror, and making the light beam reflected from the sample interfere with the light beam reflected from the reference mirror, a focusing device for recognizing a position of a middle point in a phase anomaly of interference light generated in the vicinity of a focusing point as a focusing point for the sample, and moving the sample to the focusing position, and a size measurement device for measuring a size of the sample on the basis of the interference light.
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patent: 5602643 (1997-02-01), Barrett
patent: 5706085 (1998-01-01), Blossey et al.
Article entitled "Electromagnetic Theory of Propagation, Interference and Diffraction of Light", By Max Born, et al, Published by Pergamon Press Ltd., Oxford England and distributed by The Macmillan Company, New York, New York, 1964, title page, copyright notice page, pp. 444-449.
Article entitled " Computerized Phase Microscope for Investigation of Submicron Structures", By V.P. Tychinsky et al, Published in Optics Communications, vol. 74, No. 1, 2, pp. 37-40, Dec. 1, 1989.
Kim Robert H.
Lee Andrew H.
Olympus Optical Co,. Ltd.
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