Phase grating, its fabricating method, optical encoder, motor us

Details Phase grating, its fabricating method, optical encoder, motor us Phase grating, its fabricating method, optical encoder, motor us

1996-06-10

1998-05-19

Dzierzynski, Paul M.

Optical: systems and elements

Diffraction

From grating

359566, 359900, 25023113, 250237G, 216 24, G02B 518

Patent

active

057543410

ABSTRACT:
A phase grating has a concave part of rectangular shape type substantially, of which grating depth is deeper in a specific range than depth d' calculated in a formula

REFERENCES:
patent: 4082453 (1978-04-01), Knop
patent: 5234537 (1993-08-01), Nagano et al.
patent: 5240550 (1993-08-01), Boehnke et al.
patent: 5279924 (1994-01-01), Sakai et al.
patent: 5283690 (1994-02-01), Miyake et al.
IBM Technical Disclosure Bulletin, vol. 28, No. 4, Sep. 1985, New York, U.S., pp. 1777-1779, XP002013283, Anonymous: "Electronic Tachometer for Linear Actuators."
Patent Abstracts of Japan, vol. 95, No. 007 & JP-A-07 181009 (Matsushita Electric Ind. Co., Ltd.), 18 Jul. 1995

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