Phase feedback AFM and control method therefor

Details Phase feedback AFM and control method therefor Phase feedback AFM and control method therefor

2008-03-19

2010-11-23

Larkin, Daniel S (Department: 2856)

Measuring and testing

Surface and cutting edge testing

Roughness

C850S010000, C850S011000, C850S033000

Reexamination Certificate

active

07836757

ABSTRACT:
A phase feedback AFM (atomic force microscope) and method for the phase feedback AFM. A cantilever is driven to oscillate at a constant frequency close to the resonance frequency of the cantilever by a driving signal. The distance between the probe and the sample is controlled such that the phase difference between the driving signal and a cantilever deflection signal indicating deflections of the cantilever is kept constant. The phase feedback AFM has an amplifier-controller for receiving the cantilever deflection signal, the output from an oscillator for driving the cantilever into oscillation, and a signal representing a reference amplitude of oscillation of the cantilever. The phase feedback AFM further includes a feedback circuit which receives the output from the amplifier-controller which controls the cantilever deflection signal to a preset amplitude.

REFERENCES:
patent: 6006595 (1999-12-01), Kitamura
patent: 6941798 (2005-09-01), Yamaoka et al.
patent: 6983644 (2006-01-01), Yamanaka et al.
patent: 7387016 (2008-06-01), Nakamoto
patent: 2000-346784 (2000-12-01), None

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