Phase change memory device having dielectric layer for...

Active solid-state devices (e.g. – transistors – solid-state diode – Bulk effect device – Bulk effect switching in amorphous material

Reexamination Certificate

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C257SE45002

Reexamination Certificate

active

07858960

ABSTRACT:
A phase change memory device includes a semiconductor substrate having an impurity region and an interlayer dielectric applying a tensile stress formed on the semiconductor substrate and having contact holes exposing the impurity region. Switching elements are formed in the contact holes; and sidewall spacers interposed between the switching elements and the interlayer dielectric and formed as a dielectric layer applying a compressive stress.

REFERENCES:
patent: 6121164 (2000-09-01), Yieh et al.
patent: 7651906 (2010-01-01), Park et al.
patent: 1020080078972 (2008-08-01), None

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