PFPE coatings for micro-mechanical devices

Details PFPE coatings for micro-mechanical devices PFPE coatings for micro-mechanical devices

1994-05-09

1996-04-30

Lusignan, Michael

Stock material or miscellaneous articles

Composite

Of polyisocyanurate

252 58, 310309, 427240, 4272556, 427435, 428463, B32B 2700

Patent

active

055123740

ABSTRACT:
A micro-mechanical device (10) includes relatively movable elements (11, 17) which contact or engage and which thereafter stick or adhere. A perfluoropolyether (PFPE) film (31) is applied to the contacting or engaging portions of the elements (11,17) to ameliorate or eliminate such sticking or adhesion.

REFERENCES:
patent: 4845268 (1989-07-01), Ohsaka et al.
patent: 4943750 (1990-07-01), Howe et al.
patent: 5248432 (1993-09-01), Williams
patent: 5252881 (1993-10-01), Muller et al.
patent: 5331454 (1994-07-01), Hornbeck
patent: 5403665 (1995-04-01), Alley et al.
Levine and Zisman, "Physical Properties of Monolayers Adsorbed at the Solid-Air Interface. I. Friction and Wettability of Aliphatic Polar Compounds and Effect of Halogenation." J. Phys Chem. 61, (1957) vol. 61, pp. 1068-1077.
Levine and Zisman, "Physical Properties of Monolayers Adsorbed at the Solid-Air Interface. II. Mechanical Durability of Aliphatic Polar Compounds and Effect of Halogenation", J.Phys Chem. 61, (1957) vol. 61, pp. 1188-1196.
Alley, et al., "The Effect of Release-Etch Processing on Surface Microstructure Stiction" IEEE Solid State Sensor and Actuator Workshop (1992) pp. 202-207.

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