Personality board

Details Personality board Personality board

1988-07-28

1990-02-06

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158P, G01R 3102, G01R 106

Patent

active

048991066

ABSTRACT:
A semiconductor wafer tester personality board having groups of contact pads on an upper subboard providing contact points for a test head input/output spring pins and a lower, underlying subboard is provided. Each pad group includes a force pad, a sense pad and a guard pad and is partially enclosed by a guard pattern of an electrically conductive material which is electrically connected to the guard pad. The pad groups are further separated by slits formed in the upper subboard separating adjacent groups. Within the groups, the force pad is electrically separated from the sense pad allowing separate lead wires to the semiconductor wafer under test.

REFERENCES:
patent: 4574235 (1986-03-01), Kelly et al.

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