Perpendicular magnetic film of spinel type iron oxide compound a

Details Perpendicular magnetic film of spinel type iron oxide compound a Perpendicular magnetic film of spinel type iron oxide compound a

1987-10-21

1990-12-04

Thibodeau, Paul J.

Stock material or miscellaneous articles

Web or sheet containing structurally defined element or...

Including a second component containing structurally defined...

427 38, 427128, 428694, 428900, G11B 2300

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active

049753240

ABSTRACT:
Disclosed herein is a perpendicular magnetic film of spinel type iron oxide formed on a surface of a base substrate in the form of columnar grains which are densely arranged perpendicularly to the surface of the base substrate. A vapor of an organic iron compound or a mixed vapor consisting of the organic iron compound vapor and a vapor of an organic metal compound different from the organic iron compound is added with oxygen to obtain a mixed gas. The mixed gas is subjected to chemical vapor deposition on the substrate at low temperature, at reduced pressure in plasma, thereby to obtain the perpendicular magnetic film.

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Langlet et al., Conf. Proceedings, Magnet. Thin Films (PAP. SYMP. 10), p. 110 (56/E-MRS), Jun. 1986.

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