Perovskite phase thin films and method of making

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29 2535, B32B 1806

Patent

active

061533173

ABSTRACT:
The present invention comprises perovskite-phase thin films, of the general formula A.sub.x B.sub.y O.sub.3 on a substrate, wherein A is selected from beryllium, magnesium, calcium, strontium, and barium or a combination thereof; B is selected from niobium and tantalum or a combination thereof; and x and y are mole fractions between approximately 0.8 and 1.2. More particularly, A is strontium or barium or a combination thereof and B is niobium or tantalum or a combination thereof. Also provided is a method of making a perovskite-phase thin film, comprising combining at least one element-A-containing compound, wherein A is selected from beryllium, magnesium, calcium, strontium or barium, with at least one element-B-containing compound, wherein B niobium or tantalum, to form a solution; adding a solvent to said solution to form another solution; spin-coating the solution onto a substrate to form a thin film; and heating the film to form the perovskite-phase thin film.

REFERENCES:
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patent: 5683614 (1997-11-01), Boyle
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Boyle, T., Alam, T., Dimos, D., Moore, G., Buchheit, C., Al-Shareef, H., Mechenbier, E., and Bear, B., Niobium (V) Alkoxides. Synthesis, Structure, and Characterization of [Nb (.mu.-OCH.sub.2 CH.sub.3) OCH.sub.2 C(CH.sub.3).sub.3).sub.4 ].sub.2, {[H.sub.3 CC(CH.sub.2 O)(CH.sub.2 -.mu.-O)(C(O).sub.2)]Nb.sub.2 (.mu.-O)(OCH.sub.2 CH.sub.3) .sub.5 }.sub.2, and {[H.sub.3 CC(CH.sub.2 0).sub.2 (CH.sub.2 -.mu.-O)]Nb (OCH.sub.2 CH.sub.3).sub.2 }.sub.2 for Production of Mixed Metal Oxide Thin Films, Chem. Mater., 1997, 9, 3187-3198, (no month).

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